Waferpedia

Comparison ledger

P 16 Surface versus Surfscan AIT 8010 Particle Defect

KLA P 16 Surface and KLA Surfscan AIT 8010 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
P 16 SurfaceKLA
Surfscan AIT 8010 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA PKLA Surfscan
Specifications
ConfigurationWindows XP[1]Hz 50-60[2]
Software version—3.3.2.813[2]
CIM—SECS, GEM[2]
Volts—200-240[2]
Amps—30[2]
Phase—1[2]
P 16 Surface entrySurfscan AIT 8010 Particle Defect entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing