Waferpedia

Comparison ledger

P 16 + versus Solid State

KLA P 16 + and KLA Solid State, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
P 16 +KLA
Solid StateKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA P 16 +KLA Solid State
Specifications
Phase1 Phase[1]—
Configuration2A, 20in Hg @ 1cfm[1]Upgrade for KLA AIT II & XP Series Systems[2]
Software(OS) version 7.31.05 [Build 5][1]—
P 16 + entrySolid State entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing