Comparison ledger
KLA P-17 and KLA P-2, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-17KLA | P-2KLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-17 | KLA P-2 |
| Cited variants |
| — |
| Specifications | ||
| Instrument type | Mechanical profilometer[2] | — |
| Z range | 1 mm[2] | — |
| Vertical resolution | 0.6 Å[2] | — |
| Lateral resolution | 0.5 µm[2] | — |
| Step height range | Nanometers to 1000 µm[1] | — |
| Constant force control | 0.03 to 50 mg[1] | — |
| Scan length (without stitching) | 200 mm[1] | — |
| Video camera | 5 MP high-resolution color[1] | — |
| Stylus tip radius options | 40 nm to 50 µm[3] | — |
| Stylus included angle options | 20 to 100 degrees[3] | — |
| Sample chuck range | 50 to 200 mm[1] | — |
| Model | — | P-2[4] |
| OEM | — | KLA Tencor[4] |
| Equipment type | — | Profilometer[4] |
| Sample table | — | 200 mm sample table with vacuum[5] |
| Measurement range | — | Measures steps from 100 Å to 300 µm[5] |
| Maximum sample thickness | — | 20 mm[5] |
| Minimum sample length | — | 25 mm[5] |
| Feature | — | 3D scan option[5] |
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