KLA
The KLA Tencor P-17 is an eighth-generation benchtop stylus profiler that measures 2D and 3D surface topography, including step height from nanometers to 1 mm, roughness, bow, and stress. The P-17 can scan the full diameter of a sample up to 200 mm without needing to stitch scans together.[1][2]
Plate 01ASU Core Facilities Equipment Showcase: KLA Tencor P-17 OF surface profiler
Plate 02The Kel-Tec P17's new Optic Ready Slide
Plate 03How Cheap is Too Cheap? Kel-Tec P17 Review
Plate 04Kel Tec P-17 with optic ready slide
Plate 05How the KelTec P17 Wins - 9mm versus the P17
Plate 06Kel-Tec P17, 22 LR Pistol | How It Works
The KLA Tencor P-17 is a stylus profiler, also referred to as a profilometer, used for measuring surface topography. The P-17 is the eighth generation of the P-series stylus profilers from KLA (formerly KLA-Tencor). The system offers a programmable scan stage, low noise, and sub-angstrom electronic resolution throughout the vertical range, enabling high resolution scans across the entire sample surface.[2][5][1]
The P-17 uses an UltraLite sensor assembly that combines a large linear vertical range with constant force control. The stylus force can be set from 0.03 mg to 50 mg, and the system automatically maintains the applied force regardless of the feature height. The vertical range is up to 1 mm, and the vertical resolution is 0.6 angstrom (0.6 Å). The lateral resolution is 0.5 µm.[2][3][5]
The P-17 supports both 2D and 3D scans. Data analysis includes step height, roughness, waviness, bow, and stress measurements. The Apex software platform provides advanced filtering, leveling, and analysis functions, and supports over forty surface parameters. Measurement recipes can be automated using pattern recognition and sequencing, and the system is compliant with SEMI S2, S8, S14, and CE standards.[2][6]
In the fab process flow, stylus profilometry typically follows film deposition or removal steps to confirm film thickness uniformity, etch depth, or post-CMP planarity. The P-17's ability to measure entire 200 mm substrates without stitching allows full wafer characterization. The open-frame variant (P-17 OF) extends capability to 300 mm wafers or even larger samples, supporting applications in LED, power device, and data storage manufacturing.[1][2]
Application areas include semiconductor and compound semiconductor devices (e.g., AlTiC, GaAs, Si, SiC, sapphire wafers), MEMS and optical electronics (microlens step height, etch depth), LED and power devices (MESA step height, ITO step height, epitaxial stress), and data storage (thin film head wafers, sliders, pole-tip recession). The Defect Review application allows characterization of killer defects such as scratches and pits.[2][5]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Tencor P-17 OF (Open Frame) | — | — | Larger frame to allow loading of larger samples; can be configured for 300 mm wafers or a 240 x 240 mm chuck. | kla.com[1] |
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The lateral resolution is 0.5 µm.[3]
The P-17 can scan up to 200 mm without the need for stitching.[2][1]
Yes, the Tencor P-17 OF (Open Frame) offers a larger frame to accept samples up to 300 mm wafers or a 240 x 240 mm chuck.[1][2]
The P-17 is used for metrology on materials including AlTiC, GaAs, Si, SiC, and sapphire wafers. Applications include step height, roughness, stress, bow, and defect review in semiconductors, LED, power devices, MEMS, and data storage.[2][5]
The following facts about the P-17 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P-17 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the P-17 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P-17 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P-17 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the P-17 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Sep 1, 2026.
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