Comparison ledger
KLA P-17 and KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-17KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Bare wafer inspection station |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-17 | KLA Surfscan |
| Cited variants |
| — |
| Specifications | ||
| Instrument type | Mechanical profilometer[2] | — |
| Z range | 1 mm[2] | — |
| Vertical resolution | 0.6 Å[2] | — |
| Lateral resolution | 0.5 µm[2] | — |
| Step height range | Nanometers to 1000 µm[1] | — |
| Constant force control | 0.03 to 50 mg[1] | — |
| Scan length (without stitching) | 200 mm[1] | — |
| Video camera | 5 MP high-resolution color[1] | — |
| Stylus tip radius options | 40 nm to 50 µm[3] | — |
| Stylus included angle options | 20 to 100 degrees[3] | — |
| Sample chuck range | 50 to 200 mm[1] | — |
| Configuration | — | HDD not included[4] |
| Wafer size | — | Bare wafer inspection station[4] |
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