Comparison ledger
KLA P-2 and KLA P-7, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-2KLA | P-7KLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-2 | KLA P-7 |
| Specifications | ||
| Model | P-2[1] | — |
| OEM | KLA Tencor[1] | — |
| Equipment type | Profilometer[1] | — |
| Sample table | 200 mm sample table with vacuum[2] | — |
| Measurement range | Measures steps from 100 Å to 300 µm[2] | — |
| Maximum sample thickness | 20 mm[2] | — |
| Minimum sample length | 25 mm[2] | — |
| Feature | 3D scan option[2] | — |
| equipment type | — | Stylus profilometer[3] |
| equipment type category | — | Topographical Metrology[4] |
| equipment name as listed | — | Step Profilometer (KLA Tencor P-7)[4] |
| Step Height Range | — | Nanometers to 1000 µm[5] |
| Stylus Tip Radius | — | 2 µm[6] |
| Stylus Bevel | — | 60°[6] |
| Max Scan Length | — | 150 mm[7] |
| Vertical Range | — | 1 mm[7] |
| Sample Size | — | Up to 150 mm[7] |
| Sampling Rate | — | Higher sampling rates increase data resolution, but can introduce noise above 200 Hz[6] |
| Applied Force | — | 0.03 to 50 mg[5] |
| Stylus Material | — | Diamond[5] |
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