Comparison ledger
KLA P-20H and KLA RS 75 Resistivity Mapper, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-20HKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | Legacy | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-20H | KLA RS 75 |
| Specifications | ||
| Tool type | Stylus profilometer[1] | — |
| Stylus tip radius | 2 µm[1] | — |
| Stylus cone angle | 60°[1] | — |
| Vertical range | 325 µm[1] | — |
| Sensor element | Capacitive sensor element[1] | — |
| Motion stage | Precision motion stage[1] | — |
| Vertical resolution | Roughly nm scale[1] | — |
| Stage movement | 8 inch[1] | — |
| Serial number | 09940111[1] | — |
| Tool owner | Joseph Jacob[1] | — |
| Access mode | Walk-up tool (no reservation needed)[1] | — |
| Configuration | — | 220 Volts[2] |
| Voltage | — | 120 V[3] |
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