Comparison ledger
KLA P-7 and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-7KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-7 | KLA Surfscan 6420 |
| Specifications | ||
| equipment type | Stylus profilometer[1] | — |
| equipment type category | Topographical Metrology[2] | — |
| equipment name as listed | Step Profilometer (KLA Tencor P-7)[2] | — |
| Step Height Range | Nanometers to 1000 µm[3] | — |
| Stylus Tip Radius | 2 µm[4] | — |
| Stylus Bevel | 60°[4] | — |
| Max Scan Length | 150 mm[5] | — |
| Vertical Range | 1 mm[5] | — |
| Sample Size | Up to 150 mm[5] | — |
| Sampling Rate | Higher sampling rates increase data resolution, but can introduce noise above 200 Hz[4] | — |
| Applied Force | 0.03 to 50 mg[3] | — |
| Stylus Material | Diamond[3] | — |
| Phase | — | 1 phase[6] |
| Frequency | — | 60 Hz[6] |
| Voltage | — | 208V[6] |
| Configuration | — | 16A[6] |
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