Comparison ledger
KLA P-7, KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P-7KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-7 | KLA UV 1280 SE Thin Film Thickness Measurement |
| Specifications | ||
| equipment type | Stylus profilometer[1] | — |
| equipment type category | Topographical Metrology[2] | — |
| equipment name as listed | Step Profilometer (KLA Tencor P-7)[2] | — |
| Step Height Range | Nanometers to 1000 µm[3] | — |
| Stylus Tip Radius | 2 µm[4] | — |
| Stylus Bevel | 60°[4] | — |
| Max Scan Length | 150 mm[5] | — |
| Vertical Range | 1 mm[5] | — |
| Sample Size | Up to 150 mm[5] | — |
| Sampling Rate | Higher sampling rates increase data resolution, but can introduce noise above 200 Hz[4] | — |
| Applied Force | 0.03 to 50 mg[3] | — |
| Stylus Material | Diamond[3] | — |
| Phase | 115–230 VAC - 50/60 Hz - 10–5 A - Single Phase - 3-Wire Power - 10,000 A SCCR Includes[6] | — |
| Voltage | — | 200 V[7] |
| Power | — | 1.8 kW[7] |
| Configuration | — | Single phase[7] |
| Wafer size | — | 12 inch[8] |
| Vintage (year of manufacture) | — | 2000[8] |
| Make | — | KLA[8] |
| Model | — | UV 1280 SE[8] |
| Wafer Sizes | — | 12 inch[8] |
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