Comparison ledger
KLA Profilm 3D Wafer, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Tenney |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Profilm | Tenney , TPS JR-A-F4T Junior compact temperature test chambers |
| Cited variants |
| — |
| Specifications | ||
| Objective | 100x[2] | — |
| Product family | Filmetrics Profilm3D optical profilometer[1] | — |
| Measurement type | Non-contact 3D surface topography measurement[1] | — |
| Measurement techniques | White light interferometry (WLI) and phase shifting interferometry (PSI)[1] | — |
| Objective lens range | 5X to 100X[1] | — |
| Wafer stage support | Manual R-theta wafer stage supporting 50mm to 200mm diameter wafers[1] | — |
| X-Y stage travel | 100mm x 100mm travel[3] | — |
| Z stage range | 100mm[3] | — |
| Piezo travel | 500μm[3] | — |
| Sample max weight | 2.5kg[3] | — |
| Camera | 2592 x 1944 (5MP)[3] | — |
| Chamber Size | — | 1.2 cubic feet[4] |
| Temperature Range | — | -68°C to +180°C[4] |
| Control | — | +/-1.0°C[4] |
| Manufacturer | — | Tenney[4] |
| Model | — | JR-A-F4T[4] |
| Short description | — | Junior compact temperature test chambers[4] |
| Control accuracy | — | +/-1.0°C[4] |
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