KLA
Profilm 3D Wafer
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA Profilm 3D Wafer is a Filmetrics Profilm3D optical profilometer. The KLA Profilm 3D Wafer performs non-contact 3D surface topography measurements using white light interferometry and phase shifting interferometry. The KLA Profilm 3D Wafer supports a manual R-theta wafer stage for 50mm to 200mm diameter wafers.[1][2]
What it is
The KLA Filmetrics Profilm3D is an optical profilometer for non-contact 3D surface topography measurement. The Profilm3D series uses white light interferometry and includes a Profilm3D-200 variant in the product family. The Profilm3D supports simple recipe setup for single scans or automated measurements on multiple sites for both R&D and production environments.[1][2]
How it works
General reference — not yet source-verifiedInterference-based profilometers form height maps by analyzing optical path differences while the instrument scans through focus. Optical profilometers typically combine imaging optics, precision vertical motion, stage positioning, and software analysis to reconstruct surface form and extract dimensional results.
Where it fits in the process flow
General reference — not yet source-verifiedOptical profilometers sit in metrology and process characterization rather than in patterning, deposition, or etch themselves. Optical profilometers are commonly used between process steps and after process completion to verify that a surface or feature matches the intended topography before later integration or release.
Applications
General reference — not yet source-verifiedOptical profilometers are used wherever surface form or relief must be measured without stylus contact. Optical profilometers are well suited to fragile, soft, patterned, reflective, and transparent or partially transparent samples when the process question is about topography rather than electrical behavior.
What do the numbers mean?
Vacuum & pumping1
- Measurement techniques
- White light interferometry (WLI) and phase shifting interferometry (PSI)[1]
Wafer handling1
Optics & imaging4
Dimensions & facilities1
Configuration & options4
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Profilm3D-200 | — | — | Adds a larger motorized X-Y stage with 200mm by 200mm travel. | kla.com[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Measurement techniquesWhite light interferometry (WLI) and phase shifting interferometry (PSI)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What measurement methods does the Profilm3D use?
The Profilm3D family uses white light interferometry, phase shifting interferometry, and Enhanced Roughness Mode to produce 3D surface measurements, profiles, and true-color images.[2]
Not publicly documented
The following facts about the Profilm 3D Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Profilm 3D Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Profilm 3D Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Profilm 3D Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Profilm 3D Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Profilm 3D Wafer are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Last updated Oct 17, 2026.
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