Waferpedia

Comparison ledger

Puma 9120 Darkfield Defect versus Puma 9120 Defect

KLA Puma 9120 Darkfield Defect and KLA Puma 9120 Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA Puma 9120KLA Puma 9120
Specifications
ConfigurationRefurbished[1]User Interface Software Version 9.3.309.2.8[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing