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Comparison ledger

Puma 9120 Defect versus Puma 9130 Darkfield Defect

KLA Puma 9120 Defect and KLA Puma 9130 Darkfield Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Puma 9120 DefectKLA
Puma 9130 Darkfield DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Puma 9120KLA Puma 9130
Specifications
ConfigurationUser Interface Software Version 9.3.309.2.8[1]Refurbished[2]
Puma 9120 Defect entryPuma 9130 Darkfield Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing