Comparison ledger
KLA RS 75 Resistivity Mapper and KLA Surfscan 6220, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA RS 75 | KLA Surfscan 6220 |
| Specifications | ||
| Configuration | 220 Volts[1] | Single Phase[4] |
| Voltage | 120 V[2] | 208 V[4] |
| Frequency | — | 60 Hz[4] |
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