Comparison ledger
KLA SFS 6220 Wafer, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Tenney |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1995 Vintage · 1997 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA SFS | Tenney , TPS JR-A-F4T Junior compact temperature test chambers |
| Specifications | ||
| P/N | 330345[1] | — |
| Configuration | Single Phase[1] | — |
| Voltage | 220 V[2] | — |
| Frequency | 50 Hz[2] | — |
| Model | SFS 6220 Wafer[1] | JR-A-F4T[4] |
| Manufacturer | KLA[1] | Tenney[4] |
| Category | Test & Probe[2] | — |
| Wafer size | 8 inch[1] | — |
| Power | Single Phase[2] | — |
| Power / current | 16 A[1] | — |
| Software | Complete with HDD & Software[1] | — |
| Part number | P/N 330345[1] | — |
| Marking | Includes CE Mark[1] | — |
| Display | Monitor replaced with new LCD Monitor[1] | — |
| Shelf | No Stainless Steel Shelf[1] | — |
| Description | wafer particle detection[3] | — |
| Chamber Size | — | 1.2 cubic feet[4] |
| Temperature Range | — | -68°C to +180°C[4] |
| Control | — | +/-1.0°C[4] |
| Short description | — | Junior compact temperature test chambers[4] |
| Control accuracy | — | +/-1.0°C[4] |
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