Waferpedia

KLA

SFS 6220 Wafer

Test & ProbeKLA SFS family
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SFS 6220 Wafer — Inventory photo
Fig. 01SFS 6220 WaferInventory photo[1]

What it is

The KLA SFS 6220 Wafer is a wafer tester in KLA's SFS family.[3]

How it works

General reference — not yet source-verified

A wafer tester in this class evaluates devices on a wafer before the wafers move to later assembly steps.

A test and probe system in this class uses probe contact with wafer-level structures to make electrical measurements at the wafer stage.

Where it fits in the process flow

General reference — not yet source-verified

A wafer tester belongs in wafer-level test and probe operations before singulation and package assembly.

A machine of this class is used in the fab flow where wafer-level electrical screening and device verification are performed.

Applications

General reference — not yet source-verified

A wafer tester of this class is used for wafer-level electrical test and probe work on semiconductor wafers.

What do the numbers mean?

Power & electrical4

Single Phase[1]
Accurate?
Voltage
220 V[3]
Accurate?
Frequency
50 Hz[3]
Accurate?
Power
Single Phase[3]
Accurate?

Wafer handling3

Model
SFS 6220 Wafer[1]
Accurate?
Wafer size
8 inch[1]
Accurate?
Description
wafer particle detection[2]
Accurate?

Control & software2

Complete with HDD & Software[1]
Accurate?
Software
Complete with HDD & Software[1]
Accurate?

Configuration & options12

P/N
330345[1]
Accurate?
16 A[1]
Accurate?
Includes CE Mark[1]
Accurate?
Monitor replaced with new LCD Monitor[1]
Accurate?
No Stainless Steel Shelf[1]
Accurate?
Manufacturer
KLA[1]
Accurate?
Category
Test & Probe[3]
Accurate?
Power / current
16 A[1]
Accurate?
Part number
P/N 330345[1]
Accurate?
Marking
Includes CE Mark[1]
Accurate?
Display
Monitor replaced with new LCD Monitor[1]
Accurate?
Shelf
No Stainless Steel Shelf[1]
Accurate?

Vintage & configurations

  1. 1995Vintage[1]

    1995 Vintage

  2. 1997-06-01Vintage[2]

    Vintage: 01.06.1997

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationSingle Phase[1]
  • Voltage220 V[3]
  • Frequency50 Hz[3]
  • PowerSingle Phase[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the KLA SFS 6220 Wafer?

The KLA SFS 6220 Wafer is a wafer tester made by KLA.[3]

What process area is the KLA SFS 6220 Wafer used in?

The KLA SFS 6220 Wafer is used in test and probe.[3]

Not publicly documented

The following facts about the SFS 6220 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the SFS 6220 Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SFS 6220 Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SFS 6220 Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SFS 6220 Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the SFS 6220 Wafer are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]fabsurplus.com — fabsurplus.comfabsurplus.com
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 12, 2026.

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