Waferpedia

Comparison ledger

Surfscan AIT 8010 Particle Defect versus Surfscan SP 3 Particle Defect

KLA Surfscan AIT 8010 Particle Defect and KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
Surfscan AIT 8010 Particle DefectKLA
Surfscan SP 3 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Bare wafer inspection station
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA SurfscanKLA Surfscan
Specifications
Software version3.3.2.813[1]—
CIMSECS, GEM[1]—
Volts200-240[1]—
Amps30[1]—
Phase1[1]—
ConfigurationHz 50-60[1]HDD not included[2]
Wafer size—Bare wafer inspection station[2]
Surfscan AIT 8010 Particle Defect entrySurfscan SP 3 Particle Defect entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing