Comparison ledger
KLA Surfscan SP 1 DLS Particle Defect and KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Bare wafer inspection station |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Surfscan | KLA Surfscan |
| Cited variants | — | |
| Specifications | ||
| Configuration | 300mm FOUP handler[1] | HDD not included[4] |
| Retested the CPU at bench test | CPU boots up with display but mouse and keyboard not working[1] | — |
| 75mW Laser | visually still lasting, but unable to determine the life span or quality of the laser due to inaccessibility of LonBrowser diag file.[1] | — |
| Need replacement of Bright Field laser | Hene 7mW laser PS is dead (Model: 103-2300-6-2 194016)[1] | — |
| 2 loadports | 1 not functioning[3] | — |
| Largest Load | 26 A (Laser)[3] | — |
| Input Current | 30 A, 3 Phase, 50/60 Hz[3] | — |
| Phase | 3 Phase[2] | — |
| Wafer size | — | Bare wafer inspection station[4] |
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