KLA
Surfscan SP 1 DLS Particle Defect
What is it?
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Unit is non-operational
- Monitor has no signal display during CPU boot up
- Keyboard has no functionality
- CPU boots up with display but mouse and keyboard not working
- Need replacement of Bright Field laser: Hene 7mW laser PS is dead
- Possible wiring issue
- 2 loadports, with 1 not functioning
- Missing parts: analog boards x2 and DC distribution board
What do the numbers mean?
Power & electrical3
- Readjusted all voltages to specs[1]
Wafer handling2
Optics & imaging3
Control & software1
- 2 hard drives with the software[2]
Configuration & options15
- Unit is non-operational[1]
- CPU and HDD were removed from system[1]
- PS issues/storm and system repeatedly reboots itself[1]
- Repairs / Testing:[1]
- Removed and disconnected all boards from backplane for CPU testing only. Result: Monitor still has No signal display during CPU boot up[1]
- Retested the CPU at bench test
- CPU boots up with display but mouse and keyboard not working[1]
- Retested on SP1 system test and results are unchanged.[1]
- Unable to continue further testing without CPU operational[1]
- CPU board order and received from a supplier, board tested before shipping[1]
- CPU board installed on the tool, tool powers on but no signal yet - possible wiring issue[1]
- Runs on windows NT[2]
- Missing parts[6]
- Analog boards x2[6]
- DC Distribution board[6]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Surfscan SP 1 DLS Particle Defect System, 12 inch | — | 2002 | Listed as a 12-inch configuration with FOUP handler; one source describes it as non-operational, another notes Windows NT, two loadports, and input current details. | Equipment inventory listing[1] |
| Surfscan SP 1 DLS Particle Defect System, 8 inch | — | 2009 | Listed as an 8-inch configuration with a single-station FOUP handler and missing analog boards x2 and DC distribution board. | Equipment inventory listing[6] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Surfscan SP 1 DLS Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 DLS Particle Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Surfscan SP 1 DLS Particle Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Surfscan SP 1 DLS Particle Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Surfscan SP 1 DLS Particle Defect are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Surfscan SP 1 DLS Particle Defect are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (8)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]inventory listing
- [7]Equipment inventory listing
- [8]Equipment inventory listing
Last updated Jul 29, 2026.
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