KLA
Surfscan SP 1 DLS Particle Defect
The KLA Surfscan SP 1 DLS is a particle defect detection system for semiconductor wafers.[1][2][3][4][5]
What it is
General reference — not yet source-verifiedParticle defect inspection systems scan wafer surfaces for light scattering or other optical signatures associated with particles and surface defects. Particle defect inspection systems are used in wafer fabs as metrology and inspection tools to monitor contamination, excursion risk, and process cleanliness.
How it works
General reference — not yet source-verifiedSurface inspection tools move wafers through an optical inspection path and collect scattered or reflected light from the wafer surface. Surface inspection tools use that optical signal to flag candidate defects for process monitoring and yield analysis.
Where it fits in the process flow
General reference — not yet source-verifiedParticle inspection tools are placed at monitoring points around wafer processing where contamination or added defectivity can affect downstream yield. Particle inspection tools are commonly used after deposition, etch, clean, polish, and similar wafer surface changing steps.
Applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Unit is non-operational
- Monitor has no signal display during CPU boot up
- Keyboard has no functionality
- CPU boots up with display but mouse and keyboard not working
- Need replacement of Bright Field laser: Hene 7mW laser PS is dead
- Possible wiring issue
- 2 loadports, with 1 not functioning
- Missing parts: analog boards x2 and DC distribution board
What do the numbers mean?
Power & electrical4
- Readjusted all voltages to specs[1]
Wafer handling8
Optics & imaging3
Control & software3
- 2 hard drives with the software[2]
Configuration & options17
- Unit is non-operational[1]
- CPU and HDD were removed from system[1]
- PS issues/storm and system repeatedly reboots itself[1]
- Repairs / Testing:[1]
- Removed and disconnected all boards from backplane for CPU testing only. Result: Monitor still has No signal display during CPU boot up[1]
- Retested the CPU at bench test
- CPU boots up with display but mouse and keyboard not working[1]
- Retested on SP1 system test and results are unchanged.[1]
- Unable to continue further testing without CPU operational[1]
- CPU board order and received from a supplier, board tested before shipping[1]
- CPU board installed on the tool, tool powers on but no signal yet - possible wiring issue[1]
- Runs on windows NT[2]
- Missing parts[3]
- Analog boards x2[3]
- DC Distribution board[3]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Surfscan SP 1 DLS Particle Defect System, 12 inch | — | 2002 | Listed as a 12-inch configuration with FOUP handler; one source describes it as non-operational, another notes Windows NT, two loadports, and input current details. | Equipment inventory listing[1] |
| Surfscan SP 1 DLS Particle Defect System, 8 inch | — | 2009 | Listed as an 8-inch configuration with a single-station FOUP handler and missing analog boards x2 and DC distribution board. | Equipment inventory listing[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes can the KLA Surfscan SP 1 DLS handle?
The Surfscan SP 1 DLS is available in configurations for 200 mm (8 inch) and 300 mm (12 inch) wafers.[1][2][3][4]
What operating system does the system run?
The Surfscan SP 1 DLS runs on the Windows NT operating system.[2]
Not publicly documented
The following facts about the Surfscan SP 1 DLS Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 DLS Particle Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Surfscan SP 1 DLS Particle Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Surfscan SP 1 DLS Particle Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Surfscan SP 1 DLS Particle Defect are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Surfscan SP 1 DLS Particle Defect are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (9)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]Equipment inventory listing
- [5]Equipment inventory listing
- [6]Inventory photo
- [7]Inventory photo
- [8]Inventory photo
- [9]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.
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