Comparison ledger
KLA Surfscan SP 1 DLS, Lapmaster 12 Benchtop Lapping Polishing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 12 Benchtop Lapping PolishingLapmaster | |
|---|---|---|
| OEM | KLA | Lapmaster |
| Category | CMP | CMP |
| Wafer size | For Wafer Centering Device | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Surfscan | Lapmaster 12 Benchtop Lapping Polishing |
| Specifications | ||
| Configuration | Upgraded/New[1] | Ring lapper[7] |
| Wafer size | For Wafer Centering Device[1] | — |
| Defect Sensitivity (Polished Bare Silicon) | 0.050 µm[2] | — |
| Laser Source | Argon Ion Laser (488 nm)[2] | — |
| Wafer Size Support | 200 mm and 300 mm[2] | — |
| Enhanced Rough Film Sensitivity | Yes[2] | — |
| Real Time Defect Classification (RTDC) | Yes[2] | — |
| Defect Map and Histogram with Zoom | Yes[2] | — |
| Map to Map | Yes[2] | — |
| Operator Interface | Yes[2] | — |
| Blower Unit | Yes[2] | — |
| OEM | KLA-Tencor[2] | — |
| Model | SP1 DLS[3] | 12[4] |
| Wafer Size | 200/300mm[2] | — |
| Defect Sensitivity | 0.050um on polished bare silicon[2] | — |
| Surface Type | Unpatterned[2] | — |
| Key Feature | Enhanced Rough Film Sensitivity[2] | — |
| Optional Handler | 300mm Single FOUP/FIMS Handler[2] | — |
| Make | — | Lapmaster[4] |
| Category | — | CMP[5] |
| Type/Application | — | Single sided[6] |
| Plate diameter | — | 12 in[6] |
| No. of conditioning rings | — | 3[7] |
| Base | — | Rigid, lightweight, cast aluminum base[7] |
| Standard RPM | — | 60 RPM[7] |
| RPM range with variable speed drive | — | 0-60[7] |
| Drive motor - lapper | — | 0.5 HP[7] |
| Drive motor - polisher | — | 0.75 HP[7] |
| Length | — | 25 in[7] |
| Width | — | 18 in[7] |
| Height | — | 24 in[7] |
| Estimated shipping weight | — | 240 lbs[7] |
| Approximate weight | — | 135 lbs / 61 kg[8] |
| Approximate dimensions | — | 24.5 in × 17.5 in × 23.8 in (622 mm × 445 mm × 607 mm)[8] |
| Electrical system | — | Various voltages; 50/60 Hz; 1 phase and 3 phase to customer specification[8] |
| Motor | — | 1/3 hp / 0.25 kW motor with gear reducer[8] |
| Abrasive feed system | — | Designed for water or oil based lapping slurries[8] |
| Automatic cycle timer | — | Automatic digital cycle timer[8] |
| Ring configuration | — | Ring lapper[7] |
| Ring ID | — | 4.25 inches[7] |