KLA

Surfscan SP 1 DLS

For Wafer Centering Device KLA Surfscan family

Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Surfscan SP 1 DLS — Inventory photo — Fig. 01Surfscan SP 1 DLSInventory photo^[1]

Wafer size

For Wafer Centering Device

Optics

Argon Ion Laser (488 nm)^[2]

How it works

The Surfscan SP 1 DLS uses a 488 nm argon-ion laser as its illumination source. The laser beam is scanned across the wafer surface, and scattered light from defects is collected by photomultiplier tubes. The system achieves a defect sensitivity of 0.050 µm on polished bare silicon, as tested with polystyrene sphere (PSL) reference wafers.^[2]^[3]

What do the numbers mean?

Wafer handling2

Wafer size: For Wafer Centering Device^[1]
Wafer Size Support: 200 mm and 300 mm^[2]

Optics & imaging1

Laser Source: Argon Ion Laser (488 nm)^[2]

Control & software1

Operator Interface: Yes^[2]

Configuration & options8

Upgraded/New^[1]; Y-Axis Linear Bearings (Only)^[1]
Defect Sensitivity (Polished Bare Silicon): 0.050 µm^[2]
Enhanced Rough Film Sensitivity: Yes^[2]
Real Time Defect Classification (RTDC): Yes^[2]
Defect Map and Histogram with Zoom: Yes^[2]
Map to Map: Yes^[2]
Blower Unit: Yes^[2]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Surfscan SP 1 DLS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 DLS are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan SP 1 DLS are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan SP 1 DLS are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan SP 1 DLS are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan SP 1 DLS is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources

[1]Inventory photo
[2]classoneequipment.com — classoneequipment.comclassoneequipment.com
[3]KLA-Tencor Surfscan SP 1 DLS Unpatterened Surface Inspection 12 | SemiStar — semistarcorp.comsemistarcorp.com
[4]Equipment inventory listing
[5]KLA Tencor | Substrate — kla-tencor.com (May 21, 2009)web.archive.org
[6]KLA-Tencor | Products | Browse | Data Storage — tencor.com (Jul 27, 2003)web.archive.org