Comparison ledger
KLA Surfscan SP 1 DLS, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1 DP 41Logitech | |
|---|---|---|
| OEM | KLA | Logitech |
| Category | CMP | CMP |
| Wafer size | For Wafer Centering Device | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Surfscan | Logitech 1 DP 41 |
| Specifications | ||
| Configuration | Upgraded/New[1] | 50/60 Hz[4] |
| Wafer size | For Wafer Centering Device[1] | — |
| Defect Sensitivity (Polished Bare Silicon) | 0.050 µm[2] | — |
| Laser Source | Argon Ion Laser (488 nm)[2] | — |
| Wafer Size Support | 200 mm and 300 mm[2] | — |
| Enhanced Rough Film Sensitivity | Yes[2] | — |
| Real Time Defect Classification (RTDC) | Yes[2] | — |
| Defect Map and Histogram with Zoom | Yes[2] | — |
| Map to Map | Yes[2] | — |
| Operator Interface | Yes[2] | — |
| Blower Unit | Yes[2] | — |
| OEM | KLA-Tencor[2] | — |
| Model | SP1 DLS[3] | 1 DP 41[4] |
| Wafer Size | 200/300mm[2] | — |
| Defect Sensitivity | 0.050um on polished bare silicon[2] | — |
| Surface Type | Unpatterned[2] | — |
| Key Feature | Enhanced Rough Film Sensitivity[2] | — |
| Optional Handler | 300mm Single FOUP/FIMS Handler[2] | — |
| Phase | — | 3 Phase[4] |
| Voltage | — | 480 V[4] |
| Make | — | Logitech[4] |
| Frequency | — | 50/60 Hz[4] |
| Current | — | 12 amps[4] |