Comparison ledger
KLA Surfscan SP 1 TBI and KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Surfscan | KLA UV 1280 SE Thin Film Thickness Measurement |
| Specifications | ||
| Phase | 208-240 V, Single phase[1] | — |
| Configuration | 50/60 Hz[1] | Single phase[2] |
| Full Load Amps | 24 A[1] | — |
| Machine Main Breaker Rating | 30 A[1] | — |
| Ampere Rating of Largest Load | 12 A[1] | — |
| Bright Field (DIC) Option, P/N | 515990[1] | — |
| XY Coordination, P/N | 0082158-000[1] | — |
| Bright Field Sizing, P/N | 0082158-000[1] | — |
| Haze Normalization, Haze Analysis, P/N | 0081928-000[1] | — |
| SEC-1, P/N | 0021643-000[1] | — |
| HSMS, P/N | 528080[1] | — |
| PC-NFS Cient, P/N | 556025[1] | — |
| Desktop PC Software Option, P/N | 528170[1] | — |
| Wafer size | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil[1] | — |
| Voltage | — | 200 V[2] |
| Power | — | 1.8 kW[2] |
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