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Comparison ledger

Surfscan SP 5 Particle Defect versus Viper 2401 Defect

KLA Surfscan SP 5 Particle Defect and KLA Viper 2401 Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Surfscan SP 5 Particle DefectKLA
Viper 2401 DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeBare Wafer Inspection Station—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA SurfscanKLA Viper
Specifications
ConfigurationIntegrated Console[1]50/60 Hz[2]
Wafer sizeBare Wafer Inspection Station[1]—
Phase—1 Phase[2]
Supply Voltage—100-200, 200-240 V[2]
Interrupt Capacity—10,000 Amps[2]
Surfscan SP 5 Particle Defect entryViper 2401 Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing