Waferpedia

Comparison ledger

IPEC Avanti 472versus120 Continuous

Lam Research IPEC Avanti 472, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
IPEC Avanti 472Lam Research
OEMLam ResearchLapmaster
CategoryCMPCMP
Wafer sizeSingle wafer—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPECLapmaster 120 Continuous
Specifications
ConfigurationFully automated[1]—
Wafer sizeSingle wafer[2]—
ManufacturerLam / IPEC[3]—
ModelAvanti 472[3]—
Equipment typeCMP (Chemical Mechanical Polisher)[3]—
Wafer sizes4, 5, 6, 8 inch[1]—
AutomationFully automated[1]—
Process capabilityCapable of two-step polishing to maximize wafer processing capability and quality[1]—
Configured wafer size150 mm wafers[4]—
OEMLam / IPEC[1]—
CategoryCMP (Chemical Mechanical Polisher)[1]—
Processing modeSingle wafer[1]—
Polishing capabilityCapable of two-step polishing[1]—

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]yorkscientific.comyorkscientific.com