Comparison ledger
Lam Research Rainbow 4526 XL, Tegal 110, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Rainbow 4526 XLLam Research | 110Tegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Rainbow 4526 | Tegal 110 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Oxide Etch[2] | — |
| Wafer type | Jeida flat[2] | — |
| Valve type | VAT 65[2] | — |
| Software | Envision 1.6.1-005[2] | — |
| RF | ENI-GHW50 / ENI-2MHz[2] | — |
| Robot | Harmonic Drive[2] | — |
| Loader | Hine Indexers 38A[2] | — |
| Loadlock | Entrance & Exit LL[2] | — |
| Turbo Pump | HGP Pump[2] | — |
| Controllers | HGP / VAT 65[2] | — |
| Manufacturer | Lam Research[2] | — |
| Model | Rainbow 4526 XL[2] | — |
| Category | Etch[3] | — |
| Tool type | Plasma etcher[2] | — |
| Process | Oxide etch[2] | — |
| Wafer sizes | 6 inch, 8 inch[2] | — |
| ESC | Present[2] | — |
| Endpoint | Monochromator Endpoint[2] | — |
| RF cart | Present[2] | — |
| Gas chamber | Present[2] | — |
| Ar | 485.0 sccm[2] | — |
| CF4 | 20.0 sccm[2] | — |
| CHF3 | 20.0 sccm[2] | — |
| C4F8 | 19.5 sccm[2] | — |
| CO | 200.0 sccm[2] | — |
| O2 LOW | 20.0 sccm[2] | — |
| O2 HIGH | 1000.0 sccm[2] | — |
| N2 | 100.0 sccm[2] | — |
| model | — | 110 SE[1] |
| application focus | — | process development applications[1] |
| process capability | — | deep silicon plasma etching[1] |
| capabilities | — | very high aspect ratio trench etch and profile control[1] |
| configuration | — | multiple configurations with minimum technical intervention[1] |
| System type | — | plasma etch system[4] |
| Supported components | — | MEMS and 3D-IC components[1] |
| Control capability | — | very high aspect ratio trench etch and profile control[4] |
| Physical description | — | compact[1] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →