Tegal
110
The Tegal 110 SE is a compact, flexible plasma etch system for process development applications. The Tegal 110 SE supports deep silicon plasma etching for MEMS and 3D-IC components. The Tegal 110 SE offers very high aspect ratio trench etch and profile control capabilities.[1][2]
How it works
What can it run?
Process applications and technology nodes documented for this tool.
- process development applications
- MEMS
- 3D-IC components
- deep silicon plasma etching
What do the numbers mean?
Control & software2
Configuration & options8
- multiple configurations with minimum technical intervention[1]2 sources
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 110 SE | — | — | — | web.archive.org[1] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of equipment is the Tegal 110 SE?
The Tegal 110 SE is a plasma etch system for process development applications.[1]
Not publicly documented
The following facts about the 110 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 110 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 110 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 110 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 110 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 110 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 20, 2026.
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