Comparison ledger
Lam Research SEZ SP 304, SCREEN WS 620 C, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SEZ SP 304Lam Research | WS 620 CSCREEN |
|---|---|---|
| OEM | Lam Research | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research SEZ | SCREEN WS 620 C |
| Specifications | ||
| Configuration | Equipped With:[1] | Convertible to 8"[5] |
| Manufacturer | Lam Research[2] | SCREEN / DNS[5] |
| Model | SEZ SP 304[2] | WS 620 C[5] |
| Tool type | Single wafer processing system[2] | Wet Bench[5] |
| Category | Wet Processing / Clean[3] | Wet Processing / Clean[6] |
| Wafer Size | 12 inch[2] | — |
| Wafer size | 8 inch[1] | — |
| Description | Single Wafer Processing[4] | — |
| Version | 300 mm[4] | — |
| Wafer sizes | — | 6 inch[5] |
| Convertible to | — | 8 inch[5] |
| Tank configuration | — | Caro (SPM), H/C QDR, dHF, EDR, hotPhos, H/C QDR, SC1, QDR, SC2, H/C QDR, FR, IPA Vapor Dryer[5] |
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