Waferpedia

Comparison ledger

SEZ SP 304 versus WS 620 C

Lam Research SEZ SP 304 and SCREEN WS 620 C, side by side. Every value shown is drawn from its cited encyclopedia entry.

Documented as functional equivalentsSame function class: Wet Processing / Clean, Unknown[1]
Side-by-side comparison of selected equipment models
Attribute
SEZ SP 304Lam Research
WS 620 CSCREEN
OEMLam ResearchSCREEN
CategoryWet Processing / CleanWet Processing / Clean
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyLam Research SEZSCREEN WS 620 C
Specifications
ConfigurationEquipped With:[1]Convertible to 8"[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing