Lam Research
SEZ SP 304
What is it?
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Chemistry cabinets are used
- Some parts in the tool are corroded
- The tool has been repaired and converted to Bernoulli handling
- Software adjustments have been made
What do the numbers mean?
Vacuum & pumping3
Gas & chemistry2
Configuration & options15
- Equipped With:[1]
- 8-inch Bernoulli handling[1]
- Frontside and Backside (implemented by PTW) with Pinlesschuck and Pinchuck[1]
- Cold DI in Nozzle[1]
- Hot DI in Dispenser[1]
- Heat exchangers[1]
- 1x double hex with Lauda for Di[1]
- 1x double hex with Lauda for Medium 2[1]
- 1x single hex with Lauda for Medium 1 (not used)[1]
- 1x single hex with Lauda for Medium 3[1]
- 2 Cabinets with Maintank & Buffertank[1]
- Mixtank with 3 paddle wheels[1]
- Problems:[1]
- Some parts in the tool are corroded[1]
- Tool has been repaired and converted to Bernoulli handling[1]
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Tokyo Electron Expedius Plus— Same function class: Wet Processing / Clean, UnknownCompare in depthsource[1]
- SCREEN WS 620 C— Same function class: Wet Processing / Clean, UnknownCompare in depthsource[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the SEZ SP 304 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SEZ SP 304 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SEZ SP 304 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SEZ SP 304 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the SEZ SP 304 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SEZ SP 304 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]LAM / SEZ SP304 Single Wafer Processing for sale — fabsurplus.comfabsurplus.com
Last updated Jul 29, 2026.
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Tokyo Electron Expedius Plus is a wet bench for pre-diffusion clean applications.
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