Comparison ledger
Leica , Vistec INS 3000, MRSI M1, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Vistec INS 3000Leica | M1MRSI |
|---|---|---|
| OEM | Leica | MRSI |
| Category | — | — |
| Wafer size | 200mm | 8" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Leica , Vistec INS 3000 | MRSI M1 |
| Specifications | ||
| Wafer size | Single 150/200 mm wafer loadport[1] | — |
| Type | Optical defect review station[1] | — |
| Wafer loadport | Single 150/200 mm wafer loadport[1] | — |
| Lighting | Bright field light source; DIC DUV light source[1] | — |
| Camera | UV and DUV camera[1] | — |
| Optics | 6 optics: 150x, 100x, 50x, 25x, 10x, 5x[1] | — |
| Software | Viscon Software[1] | — |
| Data interface | KLARF input[1] | — |
| Wafer handling | — | up to 8 inch[2] |
| Control platform | — | Graphical Windows™ interface[2] |