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Leica

, Vistec INS 3000

200mmLeica , Vistec INS 3000 family
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Leica Vistec INS 3000 is an optical defect review station. Leica Vistec INS 3000 includes a single 150/200 mm wafer loadport. Leica Vistec INS 3000 includes bright field light source, DIC DUV light source, UV and DUV camera.[1]

Leica, Vistec INS 3000
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Wafer size

200mm

Optics

Optical defect review station[1]

What it is

The Leica Vistec INS 3000 is an optical defect review station. The Leica Vistec INS 3000 is categorized as metrology and inspection equipment for semiconductor and PCB manufacturing.[1]

How it works

The Leica Vistec INS 3000 has a bright field light source. The Leica Vistec INS 3000 has a DIC DUV light source. The Leica Vistec INS 3000 has a UV and DUV camera. The Leica Vistec INS 3000 has a single 150/200 mm wafer loadport. The Leica Vistec INS 3000 has 6 optics, including 150x, 100x, 50x, 25x, 10x, and 5x. The Leica Vistec INS 3000 uses Viscon software. The Leica Vistec INS 3000 has frame grabber capability. The Leica Vistec INS 3000 accepts KLARF input.[1]

What do the numbers mean?

Wafer handling2

Wafer size
Single 150/200 mm wafer loadport[1]
Accurate?
Wafer loadport
Single 150/200 mm wafer loadport[1]
Accurate?

Optics & imaging3

Type
Optical defect review station[1]
Accurate?
Camera
UV and DUV camera[1]
Accurate?
Optics
6 optics: 150x, 100x, 50x, 25x, 10x, 5x[1]
Accurate?

Control & software2

Software
Viscon Software[1]
Accurate?
Data interface
KLARF input[1]
Accurate?

Configuration & options1

Lighting
Bright field light source; DIC DUV light source[1]
Accurate?

Observed configurations

How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.

Unit as listed[1]

  • Optical defect review station
  • Bright field light source
  • DIC DUV light source
  • UV and DUV camera
  • Single 150/200 mm wafer loadport
  • 6 optics, 150x, 100x, 50x, 25x, 10x, 5x
  • Viscon Software
  • Frame grabber
  • KLARF input
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Leica Vistec INS 3000?

The Leica Vistec INS 3000 is an optical defect review station.[1]

What wafer handling configuration does the Leica Vistec INS 3000 have?

The Leica Vistec INS 3000 has a single 150/200 mm wafer loadport.[1]

Not publicly documented

The following facts about the , Vistec INS 3000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the , Vistec INS 3000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the , Vistec INS 3000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the , Vistec INS 3000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the , Vistec INS 3000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the , Vistec INS 3000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]dealer listingwotol.com
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Last updated Oct 20, 2026.

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