Waferpedia

Comparison ledger

05 LHP 151versusMicroLUPI

Melles Griot 05 LHP 151, Zygo MicroLUPI, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
05 LHP 151Melles Griot
OEMMelles GriotZygo
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMelles Griot 05Zygo MicroLUPI
Specifications
ConfigurationWith 05 LPL 340 Power Supply (Does not power on)[1]optic output[3]
Equipment typeLaser[1]—
MakeMelles Griot[1]—
Model05 LHP 151[1]—
Power stateDoes not power on[1]—
Laser—Type: frequency stabilized Helium-Neon laser with fiber[3]
Wavelength—1550 nanometers[3]
Maximum Output Power—<1 milliwatt[3]
Output Power at Instrument Aperture—≤1 milliwatt[3]
Test Beam Diameter—3 mm[3]
Coherence Length—≥10 meters[3]
Mounting—Dovetail[3]
Type—Infinity Corrected SLWD Mag. N.A. Working Dist.[3]
Motor—DC brushless, microstepper[3]
Drive—leadscrew[3]
Range—6 in. (152 mm)[3]
Resolution—4 μin. (0.1 μm)[3]
Maximum Velocity—0.50 in/sec (12.7 mm/sec)[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing