Waferpedia

Comparison ledger

PM100versus03 RR 8120-001-001 Wafer Exchanger

MPI PM100, Rorze 03 RR 8120-001-001 Wafer Exchanger, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMMPIRorze
CategoryTest & ProbeTest & Probe
Wafer size6"—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMPI PM100Rorze 03 RR 8120-001-001 Wafer Exchanger
Specifications
EquipmentMPI TS150 Probe Station[1]—
UseElectrical testing on wafers or chips[1]—
Terminal capacityMaximum of 4 independent terminals + additional chuck grounding[1]—
Wafer compatibilityUp to 6 inch wafers[1]—
Probe positionersMPI PM100 true X,Y,Z micro-positioners[1]—
Probe tipsInterchangeable tungsten (W) contact tips[1]—
Chuck stageFine-glide chuck stage on highly stable granite base[1]—
Travel range150 mm x 150 mm and 10 mm x 10 mm coarse and fine X-Y travel range[1]—
Wafer size—8 inch[2]
Manufacturer—Rorze[2]
Model—03 RR 8120-001-001[2]
Equipment type—Wafer Exchanger[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com