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MPI

PM100

Test & Probe6"MPI PM100 family
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MPIPM100
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Wafer size

6"

Power

Electrical testing on wafers or chips[1]

How it works

The MPI PM100 is used with interchangeable tungsten contact tips mounted on true X, Y, and Z micro-positioners. The associated probe-station setup uses binocular optics with a digital camera to center the probe tips on contact pads. The associated probe-station setup uses manual micro-manipulators with three-axis movement to make soft and precise mechanical contact on the pads.[1][2]

The associated MPI TS150 setup places the chuck stage on a highly stable granite base and provides 150 mm x 150 mm coarse travel plus 10 mm x 10 mm fine X-Y travel. The associated setup also provides an additional electrical connection to the chuck for conductive substrates.[1][2][3]

Applications

The MPI PM100 is used in a setup for electrical testing on wafers or chips, including on-chip probing and wafer probing. The associated MPI TS150 setup is coupled to an Agilent 4155C Semiconductor Parameter Analyzer for DC characterization of devices such as resistance structures, diodes, and transistors. The associated MPI TS150 setup is also coupled to a Zürich Instruments MFIA for AC characterization of the device under test.[1][2]

  • Electrical testing
  • On-chip probing
  • Wafer probing
  • DC characterization
  • AC characterization

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Maximum DC voltage is limited to +/- 40 V during measurement.

What do the numbers mean?

Power & electrical1

Use
Electrical testing on wafers or chips[1]
Accurate?

Wafer handling3

Terminal capacity
Maximum of 4 independent terminals + additional chuck grounding[1]
Accurate?
Wafer compatibility
Up to 6 inch wafers[1]
Accurate?
Chuck stage
Fine-glide chuck stage on highly stable granite base[1]2 sources
Accurate?

Configuration & options4

Equipment
MPI TS150 Probe Station[1]
Accurate?
Probe positioners
MPI PM100 true X,Y,Z micro-positioners[1]
Accurate?
Probe tips
Interchangeable tungsten (W) contact tips[1]
Accurate?
Travel range
150 mm x 150 mm and 10 mm x 10 mm coarse and fine X-Y travel range[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • UseElectrical testing on wafers or chips[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What equipment uses the MPI PM100?

The MPI PM100 is used as the probe positioner on the MPI TS150 probe station.[1][2][3]

What motions does the MPI PM100 provide?

The MPI PM100 provides true X, Y, and Z micro-positioning.[1][2][3]

Not publicly documented

The following facts about the PM100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PM100 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the PM100 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the PM100 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the PM100 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the PM100 are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.ch — epfl.chepfl.ch
  2. [2]PM100 — MPI | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  3. [3]MPI PM100 vs Signatone 1070 comparison | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 17, 2026.

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