MPI

PM100

Test & Probe 6"MPI PM100 family

Research Quality: 30% complete

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MPIPM100

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Wafer size

Power

Electrical testing on wafers or chips^[1]

What is it?

The MPI TS150 Probe Station is described as equipment for electrical testing on wafers or chips, with up to 4 independent terminals plus additional chuck grounding. The chuck is compatible with wafer sizes up to 6 inch, chip, or part of wafers, and the probe tips are mounted on true X,Y,Z micro-positioners identified as MPI PM100.

What can it run?

Process applications and technology nodes documented for this tool.

Electrical testing
On-chip probing
Wafer probing
DC characterization
AC characterization

Why won't it start?

Documented failure modes, common issues, and field considerations.

Maximum DC voltage is limited to +/- 40 V during measurement.

What do the numbers mean?

Power & electrical1

Use: Electrical testing on wafers or chips^[1]

Wafer handling3

Terminal capacity: Maximum of 4 independent terminals + additional chuck grounding^[1]
Wafer compatibility: Up to 6 inch wafers^[1]
Chuck stage: Fine-glide chuck stage on highly stable granite base^[1]

Configuration & options4

Equipment: MPI TS150 Probe Station^[1]
Probe positioners: MPI PM100 true X,Y,Z micro-positioners^[1]
Probe tips: Interchangeable tungsten (W) contact tips^[1]
Travel range: 150 mm x 150 mm and 10 mm x 10 mm coarse and fine X-Y travel range^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

UseElectrical testing on wafers or chips^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the PM100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PM100 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PM100 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PM100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PM100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PM100 are on record.
Answerable by: an OEM parts catalog or a service engineer