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TS2000-IFEversus03 RR 8120-001-001 Wafer Exchanger

MPI TS2000-IFE, Rorze 03 RR 8120-001-001 Wafer Exchanger, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMMPIRorze
CategoryTest & ProbeTest & Probe
Wafer size200mm—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMPI TS2000-IFERorze 03 RR 8120-001-001 Wafer Exchanger
Specifications
Base toolMPI TS2000-IFE 200-mm automated probe station[1]—
Precisionmicron precision[1]—
Probe types in standard configurationtwo RF probes of GSG, GSSG or GSGSG types[1]—
Included instrumentsmicroscope and digital camera[1]—
Thermal chuck temperature range-60°C to +200 °C[1]—
Motion/controlprobes, microscope, and chuck are automatically controlled in x, y, and z directions with optical feedback[1]—
RF VNAAnritsu 4-Port ME7838G vector network analyzer capable of a single sweep from 70 kHz to 220 GHz[1]—
DC bias supplyup to 12 DC bias can be supplied by an Agilent 4156C probe station precision semiconductor parameter analyzer capable of +/-200 V, 0.5 A, and 100 V/us pulses[1]—
ModelTS2000-IFE[1]03 RR 8120-001-001[4]
OEMMPI[1]—
CategoryTest & Probe[1]—
Wafer size200 mm[1]8 inch[4]
System typeFully automated probe system[2]—
Supported wafer sizes100, 150 or 200 mm[3]—
Primary applicationsmmW, load-pull, SiPh, and Product Engineering[2]—
IceFreeEnvironment temperature range-60 °C to +300 °C[2]—
Chuck XY stage travel range220 x 490 mm[3]—
Chuck XY stage resolution0.2 μm[3]—
Chuck XY stage accuracy< 2.0 μm[3]—
Manufacturer—Rorze[4]
Equipment type—Wafer Exchanger[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]cnf.cornell.educnf.cornell.edu
  2. [2]mpi-corporation.jpmpi-corporation.jp
  3. [3]cnrood.comcnrood.com
  4. [4]Equipment inventory listing
  5. [5]waferpedia.comwaferpedia.com