MPI
TS2000-IFE
Plate 01Celadon Systems Indexer with VC20 cores on MPI TS2000-IFE with WaferWallet-Max @Productronica 2023
ATV Systems GmbHWatch on YouTubePlate 02MPI AST - Innovative Pre-RF Pulsed IV Measurements Maxime Faure AMCAD | TS2000-IFE | EuMW 2023
MPI ASTWatch on YouTube
Wafer size
200mm
Power
two RF probes of GSG, GSSG or GSGSG types[1]
Performance
micron precision[1]
Optics
microscope and digital camera[1]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Terahertz small-signal probing
What do the numbers mean?
Power & electrical3
Wafer handling2
- Motion/control
- probes, microscope, and chuck are automatically controlled in x, y, and z directions with optical feedback[1]
Optics & imaging1
Performance1
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Probe types in standard configurationtwo RF probes of GSG, GSSG or GSGSG types[1]
- RF VNAAnritsu 4-Port ME7838G vector network analyzer capable of a single sweep from 70 kHz to 220 GHz[1]
- DC bias supplyup to 12 DC bias can be supplied by an Agilent 4156C probe station precision semiconductor parameter analyzer capable of +/-200 V, 0.5 A, and 100 V/us pulses[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the TS2000-IFE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TS2000-IFE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TS2000-IFE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TS2000-IFE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TS2000-IFE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TS2000-IFE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]cnf.cornell.edu — cnf.cornell.educnf.cornell.edu
Last updated Jul 26, 2026.
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