Comparison ledger
Nikon 1505 G 6 E, OAI Model 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1505 G 6 ENikon | Model 2000OAI |
|---|---|---|
| OEM | Nikon | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | 1988– | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon 1505 | OAI Model 2000 |
| Cited variants | — | |
| Specifications | ||
| Configuration | 5" reticle[2] | — |
| Resolution | 650 nm[3] | — |
| Numerical Aperture | 0.54[3] | — |
| Reduction | 5x[3] | — |
| Exposure Field | 15 x 15 mm[3] | — |
| Alignment Accuracy | 130 nm[3] | — |
| Wafer Size | 4 inch[2] | — |
| Light Source | g-line[4] | — |
| Introduction Year | 1988[3] | — |
| NA (Numerical Aperture) | 0.54[3] | — |
| Make | Nikon[2] | — |
| Model | 1505 G 6 E[2] | — |
| Category | Stepper[2] | — |
| Wafer Sizes | 4 inch[2] | — |
| Exposure type | g-line[3] | — |
| NA | 0.54[3] | — |
| Exposure field | 9.3 x 18.8 mm[3] | — |
| Product category | — | UV Exposure Systems[5] |
| Type | — | Edge-bead and UV flood exposure system[1] |
| Exposure beam size | — | Up to 300mm diameter[1] |
| Beam divergence | — | < 2.0° (1/2 angle)[1] |
| Beam spectrum | — | Near UV, Mid UV, Deep UV[1] |
| Beam uniformity | — | ±5.0%[1] |
| Timer | — | 0.1 to 999.9 sec. (0.1 sec. increments)[1] |
| Power supplies | — | 200W to 5,000W[1] |
| Power regulation | — | Better than ±0.5%[1] |
| Intensity control | — | Dual channel optical feedback loop with ±2% precision and long term repeatability[1] |
| Wafer capacity | — | To 300mm[1] |
| Substrate transfer | — | Cassette-to-cassette[1] |
| Handling | — | Vacuum arm (end effector)[1] |
| Flat orientation | — | ±1 degree[1] |
| Precision | — | ±25 microns[1] |
| Z precision | — | ±12.5 microns[1] |
| Electrical | — | 208/60Hz 3-phase[1] |
| Vacuum | — | 25" Hg[1] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →