Comparison ledger
Nikon 6 D Autocollimator and Nikon MM40, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 6 D AutocollimatorNikon | MM40Nikon |
|---|---|---|
| OEM | Nikon | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon 6 D Autocollimator | Nikon MM40 |
| Cited variants | ||
| Specifications | ||
| Configuration | In case with light source[6] | — |
| equipment name | — | Nikon MM 40[7] |
| equipment type | — | inspection and 2-D metrology microscope[7] |
| section | — | Inspection Microscope without Camera[7] |
| location | — | Z05[7] |
| option | — | Measurement XYZ[7] |
| Type | — | Inspection and 2-D metrology microscope[7] |
| Measurement capabilities | — | XY and Z (Measurement XYZ)[7] |
| Original illuminator power (halogen) | — | 20W[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →