MM40

Metrology and inspection microscopes are optical instruments used to examine patterned surfaces, measure feature locations, and compare fabricated structures against intended geometry. Metrology microscopes in fab and laboratory work commonly support visual review together with stage-based dimensional measurement on samples such as wafers, masks, and small components.

Optical inspection and metrology microscopes form a magnified image of the sample and combine that image with a measurement reference from the stage or reticle. Optical metrology on this class of tool generally relies on bringing features into focus, aligning edges or fiducials in the field of view, and reading position changes as the sample is moved along the measurement axes.

Inspection microscopes and metrology microscopes are used outside the main patterning and deposition steps to verify results before later process decisions are made. Optical metrology of this kind commonly appears around lithography, etch, thin film, and packaging work whenever operators need direct visual confirmation of alignment marks, defects, overlay relationships, or simple dimensional results.