Waferpedia

Comparison ledger

Eclipse L 200 ND versus MM40

Nikon Eclipse L 200 ND and Nikon MM40, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
MM40Nikon
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyNikon Eclipse L 200 NDNikon MM40
Cited variants
  • ECLIPSE L200N[1]
  • MM40 20W[2]
  • MM40 50W Low Power[3]
  • MM40 50W High Power[4]
Specifications
equipment nameNikon MM 40[5]
equipment typeinspection and 2-D metrology microscope[5]
sectionInspection Microscope without Camera[5]
locationZ05[5]
optionMeasurement XYZ[5]
TypeInspection and 2-D metrology microscope[5]
Measurement capabilitiesXY and Z (Measurement XYZ)[5]
Original illuminator power (halogen)20W[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]manualslib.commanualslib.com
  2. [2]nano-dyne.comnano-dyne.com
  3. [3]nano-dyne.comnano-dyne.com
  4. [4]nano-dyne.comnano-dyne.com
  5. [5]epfl.chepfl.ch