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LV100 versus LV100ND

Nikon LV100 and Nikon LV100ND, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
LV100Nikon
LV100NDNikon
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyNikon LV100Nikon LV100ND
Specifications
Instrument typePolarized microscope with heating stage[1]
Listed modelNikon LV100 POL[1]
IlluminatorEPI Illuminator with bright and darkfield[1]
Objectives5X, 10X, 20X, 50X, 100X objectives[1]5X, 10X, 20X, 50X, and 100X Plan Fluor high numerical aperture lenses[2]
Camera headColor camera head[1]
Heating stageInstec HCS 3 heating stage[1]
Heating stage temperature range-190 to 400 °C[1]
Microscope typeOptical microscope[2]
LightingTop and bottom lighting using LED white light with adjustable intensity[2]
Brightfield / darkfield10X Ultra Wide Field brightfield and darkfield for all five lenses[2]
DICSelectable Nomarski Differential Interference Contrast for top-down lighting only[2]
Stage6" x 4" XY stage with glass plate[2]
CondenserAbbe condenser[2]
CameraDS-Ri2 Nikon camera, high definition 18 megapixel[2]
SoftwareNikon NIS-Elements D Software[2]
Instrument count and locationsTwo microscopes in the Flexible Cleanroom and two in the Nanopatterning Cleanroom[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]snsf.stanford.edusnsf.stanford.edu
  2. [2]snsf.stanford.edusnsf.stanford.edu