Comparison ledger
Nikon LV100 and Nikon NRM 3100 SP+ Overlay Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | LV100Nikon | |
|---|---|---|
| OEM | Nikon | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon LV100 | Nikon NRM 3100 SP+ Overlay Measurement |
| Specifications | ||
| Instrument type | Polarized microscope with heating stage[1] | — |
| Listed model | Nikon LV100 POL[1] | — |
| Illuminator | EPI Illuminator with bright and darkfield[1] | — |
| Objectives | 5X, 10X, 20X, 50X, 100X objectives[1] | — |
| Camera head | Color camera head[1] | — |
| Heating stage | Instec HCS 3 heating stage[1] | — |
| Heating stage temperature range | -190 to 400 °C[1] | — |
| Phase | — | 1 Phase[2] |
| Configuration | — | 50/60 Hz[2] |
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