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Comparison ledger

MM40 versus SMZ-1

Nikon MM40 and Nikon SMZ-1, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
MM40Nikon
SMZ-1Nikon
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyNikon MM40Nikon SMZ-1
Cited variants
  • MM40 20W[1]
  • MM40 50W Low Power[2]
  • MM40 50W High Power[3]
Specifications
equipment nameNikon MM 40[5]
equipment typeinspection and 2-D metrology microscope[5]
sectionInspection Microscope without Camera[5]
locationZ05[5]
optionMeasurement XYZ[5]
TypeInspection and 2-D metrology microscope[5]Binocular microscope[5]
Measurement capabilitiesXY and Z (Measurement XYZ)[5]
Original illuminator power (halogen)20W[1]
LocationZ09[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]nano-dyne.comnano-dyne.com
  2. [2]nano-dyne.comnano-dyne.com
  3. [3]nano-dyne.comnano-dyne.com
  4. [4]manualslib.commanualslib.com
  5. [5]epfl.chepfl.ch