Comparison ledger
Nikon MM40 and Nikon SMZ-1, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | MM40Nikon | SMZ-1Nikon |
|---|---|---|
| OEM | Nikon | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon MM40 | Nikon SMZ-1 |
| Cited variants |
| |
| Specifications | ||
| equipment name | Nikon MM 40[5] | — |
| equipment type | inspection and 2-D metrology microscope[5] | — |
| section | Inspection Microscope without Camera[5] | — |
| location | Z05[5] | — |
| option | Measurement XYZ[5] | — |
| Type | Inspection and 2-D metrology microscope[5] | Binocular microscope[5] |
| Measurement capabilities | XY and Z (Measurement XYZ)[5] | — |
| Original illuminator power (halogen) | 20W[1] | — |
| Location | — | Z09[5] |
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