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Comparison ledger

NSR 2205 EX 14 Cversus150 e Mask

Nikon NSR 2205 EX 14 C, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
150 e MaskSUSS MicroTec
OEMNikonSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNikon NSR 2205SUSS MicroTec 150 e Mask
Specifications
Configuration250nm[1]—
ManufacturerNikon[2]—
ModelNSR 2205 EX 14 C[2]—
Wafer Sizes8 inch[1]—
Specification250nm[2]—
Vintage2000[1]—
CategoryLithography[2]—
Tool typeLithography stepper[2]—
Resolution250nm[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com