Nikon
NSR 2205 EX 14 C
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedA lithography stepper transfers circuit patterns from a mask onto a photosensitive wafer surface by exposing one field at a time.
A stepper belongs to the photolithography portion of semiconductor manufacturing, where patterned light exposure defines features before later development and etch steps.
Where it fits in the process flow
General reference — not yet source-verifiedThe Nikon NSR 2205 EX 14 C sits in the wafer patterning flow after resist coating and alignment and before resist development and downstream pattern transfer.
Applications
General reference — not yet source-verifiedThe Nikon NSR 2205 EX 14 C is used for wafer-level photolithographic patterning in semiconductor fabrication.
What do the numbers mean?
Wafer handling1
Optics & imaging1
Configuration & options7
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of lithography system is the NSR 2205 EX 14 C?General reference — not yet source-verified
The NSR 2205 EX 14 C is a model of photolithography system produced by Nikon, belonging to the class of optical steppers or scanners used for semiconductor wafer patterning. Specific details of its stage architecture and illumination source are model-specific, but it follows the general operating principles of projection lithography.
How does a photolithography system align patterns from one layer to the next?General reference — not yet source-verified
Alignment is achieved through dedicated sensors that read alignment marks on the wafer and the reticle. The stage moves to overlay the projected image precisely on the previous pattern. In machines of this class, alignment accuracy is maintained by laser interferometers and closed-loop servo control.
What are the typical maintenance requirements for this class of machine?General reference — not yet source-verified
Routine maintenance includes cleaning of optical components (lens elements, masks), calibration of stage motion and alignment systems, replacement of light source bulbs or modules, and monitoring of environmental conditions like temperature and vibration. Periodic performance qualifications using test wafers are standard.
Can the NSR 2205 EX 14 C be used for both development and production?General reference — not yet source-verified
Yes, photolithography systems of this class are versatile and can be employed in both production lines and development labs. However, production use may require higher throughput and reliability, while development may emphasize process flexibility and sensitivity adjustments.
Not publicly documented
The following facts about the NSR 2205 EX 14 C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 2205 EX 14 C are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR 2205 EX 14 C are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR 2205 EX 14 C are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR 2205 EX 14 C are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR 2205 EX 14 C is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]Equipment inventory listing
Last updated Oct 13, 2026.
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