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Comparison ledger

Exceed 2000 Aversus160 XP Ion

Nissin Exceed 2000 A, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMNissinVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNissin Exceed 2000Varian 160 XP Ion
Specifications
GasAr, Arsenic, BF3, PH3[1]—
SOWin 2000 Japan[1]—
ConfigurationMissing:[1]150mm High Current IMP[5]
OSJDOS[2]—
CategoryIon Implantation[3]Ion Implantation[5]
Wafer size8-inch wafers[4]—
Gas deliveryAr, Arsenic, BF3, PH3[3]—
Missing itemsturbo, dry pump, bsm power supply, all mfcs[2]—
OEM—Varian[6]
Model—160 XP Ion[6]
Tool type—ion implanter[5]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]waferpedia.comwaferpedia.com
  6. [6]Equipment inventory listing