Waferpedia

Nissin

Exceed 2000 A

Ion ImplantationNissin Exceed 2000 family
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NissinExceed 2000 A
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Power

bsm power supply[1]

Vacuum

turbo[1]

Gas delivery

Ar, Arsenic, BF3, PH3[1]

What it is

The Nissin Exceed 2000 A is an ion implantation machine.[3][4]

How it works

General reference — not yet source-verified

An ion implanter accelerates ions into a wafer surface so selected species enter the near-surface region of the material.

Where it fits in the process flow

General reference — not yet source-verified

Ion implantation is a front-end semiconductor process step that follows earlier wafer formation and supports later thermal and film-processing steps.

The Nissin Exceed 2000 A fits in the wafer doping sequence before downstream activation or drive-in operations that complete the electrical effect of the implanted species.

Applications

The Nissin Exceed 2000 A is used for ion implantation in semiconductor manufacturing.[3][4]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Controller issues
  • Missing turbo, dry pump, bsm power supply, and all mfcs

What do the numbers mean?

Power & electrical2

bsm power supply[1]
Accurate?
Missing items
turbo, dry pump, bsm power supply, all mfcs[2]
Accurate?

Vacuum & pumping2

turbo[1]
Accurate?
dry pump[1]
Accurate?

Wafer handling1

Wafer size
8-inch wafers[4]
Accurate?

Gas & chemistry2

Gas
Ar, Arsenic, BF3, PH3[1]
Accurate?
Gas delivery
Ar, Arsenic, BF3, PH3[3]
Accurate?

Control & software1

Controller issues[2]
Accurate?

Configuration & options6

SO
Win 2000 Japan[1]
Accurate?
Missing:[1]
Accurate?
all mfcs[1]
Accurate?
OS
JDOS[2]
Accurate?
Category
Ion Implantation[3]
Accurate?
OS
Win 2000 Japan[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • GasAr, Arsenic, BF3, PH3[1]
  • Configurationturbo[1]
  • Configurationdry pump[1]
  • Configurationbsm power supply[1]
  • Gas deliveryAr, Arsenic, BF3, PH3[3]
  • Missing itemsturbo, dry pump, bsm power supply, all mfcs[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of tool is the Nissin Exceed 2000 A?

The Nissin Exceed 2000 A is an ion implantation machine.[3][4]

Not publicly documented

The following facts about the Exceed 2000 A are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Exceed 2000 A are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Exceed 2000 A are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Exceed 2000 A are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Exceed 2000 A is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Exceed 2000 A are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
  4. [4]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 13, 2026.

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