Waferpedia

Comparison ledger

BH2 versus MX80

Olympus BH2 and Olympus MX80, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
BH2Olympus
MX80Olympus
OEMOlympusOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOlympus BH2Olympus MX80
Specifications
Instrument typeOptical inspection microscope[1]
LocationFlexible Cleanroom (Spilker 131)[1]
Listed in facility equipmentMicroscope: Olympus BH2 Microscope[2]
Equipment typeMicroscope[3]
Facility-listed useOptical inspection microscope[1]
Objectives1.25x, 5x, 10x, 20x, 50x, and 100x[4]
Eyepiece10x binocular eyepiece[4]
CameraOptronics MagnaFire camera with capture software[4]
Image analysis softwareImagePro Plus[4]
Dark field imagingAvailable for 5x through 100x objectives[4]
Nomarski imagingIncluded for 5x through 100x objectives[4]
IlluminationTop and bottom illumination[4]
UV filterFor imaging photoresist[4]
OutputPhoto printer[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]snf.stanford.edusnf.stanford.edu
  2. [2]snsf.stanford.edusnsf.stanford.edu
  3. [3]manualslib.commanualslib.com
  4. [4]nanofab.ece.cmu.edunanofab.ece.cmu.edu