Waferpedia

Comparison ledger

BH2 versus scope2

Olympus BH2 and Olympus scope2, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
BH2Olympus
scope2Olympus
OEMOlympusOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOlympus BH2Olympus scope2
Specifications
Instrument typeOptical inspection microscope[1]
LocationFlexible Cleanroom (Spilker 131)[1]
Listed in facility equipmentMicroscope: Olympus BH2 Microscope[2]
Equipment typeMicroscope[3]
Facility-listed useOptical inspection microscope[1]
VendorOlympus[4]
ModelMX-61[4]
PurposeSemiconductor microscope for sample inspection and documentation[4]
Observation methodsBrightfield and darkfield[4]
Objectives5x, 10x, 20x, 50x, and 100x objectives on motorized turret[4]
Stage focusManual stage focus[4]
Digital imaging softwareSteam Motion software for calibrated measurements[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]snf.stanford.edusnf.stanford.edu
  2. [2]snsf.stanford.edusnsf.stanford.edu
  3. [3]manualslib.commanualslib.com
  4. [4]uwaterloo.cauwaterloo.ca