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Olympus

scope2

Metrology & InspectionOlympus scope2 family
Research Quality: 40% complete
scope2 — uwaterloo.ca
Fig. 01scope2uwaterloo.ca[1]

What is it?

The Olympus scope2 is listed as Microscope #2 in the Quantum-Nano Fabrication and Characterization Facility. The source identifies it as an Olympus MX-61 semiconductor microscope for sample inspection and documentation, with brightfield and darkfield observation, a motorized turret with 5x, 10x, 20x, 50x, and 100x objectives, manual stage focus, and digital imaging with Steam Motion software for calibrated measurements.

What can it run?

Process applications and technology nodes documented for this tool.

  • Sample inspection
  • Documentation
  • Calibrated measurements

What do the numbers mean?

Optics & imaging1

Objectives
5x, 10x, 20x, 50x, and 100x objectives on motorized turret[1]
Accurate?

Control & software1

Digital imaging software
Steam Motion software for calibrated measurements[1]
Accurate?

Configuration & options5

Vendor
Olympus[1]
Accurate?
Model
MX-61[1]
Accurate?
Purpose
Semiconductor microscope for sample inspection and documentation[1]
Accurate?
Observation methods
Brightfield and darkfield[1]
Accurate?
Stage focus
Manual stage focus[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the scope2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the scope2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the scope2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the scope2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the scope2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the scope2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]uwaterloo.cauwaterloo.cauwaterloo.ca
  2. [2]Main cleanroom | Quantum-Nano Fabrication and Characterization Facility | University of Waterloouwaterloo.cauwaterloo.ca
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Last updated Jul 29, 2026.

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